The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD

Brijs, BertBertBrijsGiangrandi, SimoneSimoneGiangrandiArstila, K.K.ArstilaBergmaier, A.A.BergmaierKimura, K.K.KimuraConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstVantomme, AndreAndreVantomme2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10154The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERDOral presentation