Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures

Mortet, V.V.MortetElmazria, O.O.ElmazriaNesladek, M.M.NesladekAssouar, M.B.M.B.AssouarVanhoyland, G.G.VanhoylandD'Haen, JanJanD'HaenD'Olieslaeger, MarcMarcD'OlieslaegerAlnot, P.P.Alnot2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6623Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structuresJournal article