Junction technology challenges and solutions for 3D device architecture

Kikuchi, YoshiakiYoshiakiKikuchiMertens, HansHansMertensRitzenthaler, RomainRomainRitzenthalerChiarella, ThomasThomasChiarellaPeter, AntonyAntonyPeterHoriguchi, NaotoNaotoHoriguchi2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33296Junction technology challenges and solutions for 3D device architectureProceedings paperhttps://ieeexplore.ieee.org/document/8802891