Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloGronheid, RoelRoelGronheidLin, GuanyanGuanyanLinCao, YiYiCaoRomo Negreira, AinhoaAinhoaRomo NegreiraSomervell, MarkMarkSomervellNafus, KathleenKathleenNafusNealey, PaulPaulNealey2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22996Process sensitivities in exemplary chemo-epitaxy directed self-assembly integrationProceedings paper