Hiblot, GaspardGaspardHiblotVan der Plas, GeertGeertVan der Plas2021-10-252021-10-2520180741-3106https://imec-publications.be/handle/20.500.12860/30893Factor analysis of plasma-induced damage in bulk FinFET technologyJournal articlehttps://ieeexplore.ieee.org/document/8360171/