Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations

Bury, ErikErikBuryKaczer, BenBenKaczerVan Beek, SimonSimonVan BeekLinten, DimitriDimitriLinten2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30342Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulationsProceedings paperhttps://ieeexplore.ieee.org/document/8486872