Charavel, RemyRemyCharavelRoig, JaimeJaimeRoigAltamirano Sanchez, EfrainEfrainAltamirano SanchezVan Aelst, JokeJokeVan AelstDevriendt, KatiaKatiaDevriendtVan Wichelen, KoenKoenVan WichelenGassot, PierrePierreGassotCoppens, PeterPeterCoppensDe Backer, EddyEddyDe Backer2021-10-192021-10-1920110894-6507https://imec-publications.be/handle/20.500.12860/18652Wafer bevel protection during deep reactive ion etchingJournal article