Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

Czerwinski, A.A.CzerwinskiKatcki, J.J.KatckiPoyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, C.C.ClaeysRatajczak, J.J.RatajczakGaubas, EugenijusEugenijusGaubas2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4226Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilitiesOral presentation