Rottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenVan Hoof, ChrisChrisVan HoofTilmans, HarrieHarrieTilmans2021-10-192021-10-1920110947-8396https://imec-publications.be/handle/20.500.12860/19711Acoustic meta-materials in MEMS BAW resonatorsJournal article