Self-aligned amorphous-IGZO TFTs: Impact of source-drain contacts formation on their negative-bias-illumination-stress (NBIS) instability

Nag, ManojManojNagSteudel, SoerenSoerenSteudelSmout, SteveSteveSmoutBhoolokam, AjayAjayBhoolokamGenoe, JanJanGenoeCobb, BrianBrianCobbKumar, AbhishekAbhishekKumarGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25686Self-aligned amorphous-IGZO TFTs: Impact of source-drain contacts formation on their negative-bias-illumination-stress (NBIS) instabilityProceedings paper