Wafer level electrical evaluation of vertical carbon nanotube bundles as a function of the growth temperature

Vereecke, BartBartVereeckevan der Veen, MarleenMarleenvan der VeenSugiura, MasahitoMasahitoSugiuraKashiwagi, YusakuYusakuKashiwagiKe, XiaoxingXiaoxingKeCott, DaireDaireCottHantschel, ThomasThomasHantschelHuyghebaert, CedricCedricHuyghebaertTokei, ZsoltZsoltTokei2021-10-212021-10-2120130021-4922https://imec-publications.be/handle/20.500.12860/23330Wafer level electrical evaluation of vertical carbon nanotube bundles as a function of the growth temperatureJournal articlehttp://jjap.jsap.jp/link?JJAP/52/04CN02/