Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys

Sedky, SherifSherifSedkyFiorini, PaoloPaoloFioriniCaymax, MattyMattyCaymaxVerbist, AgnesAgnesVerbistBaert, KrisKrisBaert2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2126Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloysProceedings paper