A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS

Kalicinski, StanislawStanislawKalicinskiTilmans, HarrieHarrieTilmansWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/12381A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMSProceedings paper