Effect of boron doping on the wear behavior of the growth and nucleation surfaces of micro- and nanocrystalline diamond films

Buijnsters, Josephus G.Josephus G.BuijnstersTsigkourakos, MenelaosMenelaosTsigkourakosHantschel, ThomasThomasHantschelGomes, OliverOliverGomesNuytten, ThomasThomasNuyttenFavia, PaolaPaolaFaviaBender, HugoHugoBenderArstila, KaiKaiArstilaCelis, Jean-PierreJean-PierreCelisVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-2320161944-8244https://imec-publications.be/handle/20.500.12860/26383Effect of boron doping on the wear behavior of the growth and nucleation surfaces of micro- and nanocrystalline diamond filmsJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acsami.6b08083