Swerts, JohanJohanSwertsPopovici, Mihaela IoanaMihaela IoanaPopoviciKaczer, BenBenKaczerAoulaiche, MarcMarcAoulaicheRedolfi, AugustoAugustoRedolfiClima, SergiuSergiuClimaCaillat, CristianCristianCaillatWang, W.C.W.C.WangAfanasiev, ValeriValeriAfanasievJourdan, NicolasNicolasJourdanHody, HubertHubertHodyOlk, ChristinaChristinaOlkVan Elshocht, SvenSvenVan ElshochtJurczak, GosiaGosiaJurczak2021-10-222021-10-2220140741-3106https://imec-publications.be/handle/20.500.12860/24580Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implicationsJournal articlehttp://www.ieeeexplore.us/xpl/articleDetails.jsp?tp=&arnumber=6820790&queryText%3Dleakage+control+metal-insulator-metal+capacito