Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM

Yamana, MitsuharuMitsuharuYamanaWada, ShingoShingoWadaNagatomo, TatsuyaTatsuyaNagatomoTonooka, YojiYojiTonookaLamantia, MatthewMatthewLamantiaPhilipsen, VickyVickyPhilipsen2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16570Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSMJournal articlehttp://spie.org/Documents/Membership/BacusNewsletters/BACUS-Newsletter-September-2009.pdf