Electron trap profiling near Al2O3/ gate interface in TANOS stack using gate-side-trap spectroscopy by charge injection and sensing

Zahid, MohammedMohammedZahidArreghini, AntonioAntonioArreghiniDegraeve, RobinRobinDegraeveGovoreanu, BogdanBogdanGovoreanuSuhane, AmitAmitSuhaneVan Houdt, JanJanVan Houdt2021-10-192021-10-1920100741-3106https://imec-publications.be/handle/20.500.12860/18402Electron trap profiling near Al2O3/ gate interface in TANOS stack using gate-side-trap spectroscopy by charge injection and sensingJournal article