Dutta, ShibeshShibeshDuttaKundu, ShreyaShreyaKunduGupta, AnshulAnshulGuptaJamieson, GeraldineGeraldineJamiesonGomez Granados, Juan FernandoJuan FernandoGomez GranadosBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokeiAdelmann, ChristophChristophAdelmann2021-10-242021-10-2420170741-3106https://imec-publications.be/handle/20.500.12860/28291Highly scaled ruthenium interconnectsJournal articlehttp://ieeexplore.ieee.org/document/7934397/