Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyVincent, BenjaminBenjaminVincentWitters, LiesbethLiesbethWittersEneman, GeertGeertEnemanMitard, JeromeJeromeMitardRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVandervorst, WilfriedWilfriedVandervorstThean, AaronAaronThean2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22722Epitaxial growth challenges for advanced CMOS devicesProceedings paper