Brijs, BertBertBrijsDe Coster, WalterWalterDe CosterBender, HugoHugoBenderAlay, Josep LluisJosep LluisAlayOsiceanu, PetrePetreOsiceanuVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/60Sputtering phenomena of CoSi2 under low energy oxygen bombardmentJournal article