On the processing aspects of high performance hybrid backside

De Vos, JoeriJoeriDe VosDe Munck, KoenKoenDe MunckMinoglou, KikiKikiMinoglouRamachandra Rao, PadmakumarPadmakumarRamachandra RaoErismis, Mehmet AkifMehmet AkifErismisDe Moor, PietPietDe MoorSabuncuoglu Tezcan, DenizDenizSabuncuoglu Tezcan2021-10-192021-10-1920110960-1317https://imec-publications.be/handle/20.500.12860/18807On the processing aspects of high performance hybrid backsideJournal articlehttp://stacks.iop.org/0960-1317/21/074006