Erdmann, AndreasAndreasErdmannEvanschitzky, PeterPeterEvanschitzkyMesilhy, HazemHazemMesilhyPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxBauer, MarkusMarkusBauer2021-10-252021-10-2520181932-5150https://imec-publications.be/handle/20.500.12860/30681Attenuated phase shift mask for extreme ultraviolet: can they mitigate three-dimensional mask effects?Journal articlehttps://doi.org/10.1117/1.JMM.18.1.011005