Si-passivated Ge nFET towards a reliable Ge CMOS

Arimura, HiroakiHiroakiArimuraSioncke, SonjaSonjaSionckeCott, DaireDaireCottMitard, JeromeJeromeMitardVanherle, WendyWendyVanherleLoo, RogerRogerLooFranco, JacopoJacopoFrancoConard, ThierryThierryConardFavia, PaolaPaolaFaviaBender, HugoHugoBenderWitters, LiesbethLiesbethWittersMertens, HansHansMertensRagnarsson, Lars-AkeLars-AkeRagnarssonPourtois, GeoffreyGeoffreyPourtoisHeyns, MarcMarcHeynsMocuta, AndaAndaMocutaThean, AaronAaronTheanMocuta, DanDanMocutaCollaert, NadineNadineCollaert2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26291Si-passivated Ge nFET towards a reliable Ge CMOSProceedings paper