Diffractive optical element applied to proximity exposure lithography exploring partial light coherence

Verdonck, PatrickPatrickVerdonckCirino, GiuseppeGiuseppeCirinoMansano, RonaldoRonaldoMansanoGoncalves Neto, LuizLuizGoncalves Neto2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18261Diffractive optical element applied to proximity exposure lithography exploring partial light coherenceProceedings paper