Sayan, SafakSafakSayanVanelderen, PieterPieterVanelderenHetel, IulianIulianHetelChan, BTBTChanRaghavan, PraveenPraveenRaghavanBlanco, VictorVictorBlancoFoubert, PhilippePhilippeFoubertD'Urzo, LuciaLuciaD'UrzoDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenberghe2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29385High volume manufacturing compatible dry development rinse process (DDRP): patterning and defectivity performance for EUVLProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2618452