Bogaerts, LieveLieveBogaertsPhommahaxay, AlainAlainPhommahaxayGerets, CarineCarineGeretsJaenen, PatrickPatrickJaenenVan Hoof, RitaRitaVan HoofSeveri, SimoneSimoneSeveriVan De Peer, MyriamMyriamVan De PeerDe Coster, JeroenJeroenDe CosterLa Manna, AntonioAntonioLa MannaSoussan, PhilippePhilippeSoussanWitvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18589Temporary protective packaging for optical MEMSProceedings paper