Tallarida, MassimoMassimoTallaridaAdelmann, ChristophChristophAdelmannCuypers, DanielDanielCuypersRodriguez, LeonardLeonardRodriguezLin, DennisDennisLinMichling, MarcelMarcelMichlingFriedrich, DanielDanielFriedrichDe Clercq, AstridAstridDe ClercqDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtLocquet, Jean-PierreJean-PierreLocquetCaymax, MattyMattyCaymaxSchmeisser, DieterDieterSchmeisser2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21582Interface chemistry of Al2O3/III-V upon atomic layer depositionOral presentationhttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=168&year=2012&Itemid=&id_season=6&PHPSESSID=4a1e1f1d31