Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer

Claes, GertGertClaesVan Barel, GregGregVan BarelVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisGromova, MariaMariaGromovaVerbist, AgnesAgnesVerbistVan der Donck, TomTomVan der DonckDecoutere, StefaanStefaanDecoutereCelis, Jean-PierreJean-PierreCelisWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13528Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layerProceedings paperhttp://www.mrs.org/s_mrs/sec_subscribe.asp?CID=12438&DID=213870&action=detail