Challenges of large area integration of 2D materials in CMOS line

Huyghebaert, CedricCedricHuyghebaertSchram, TomTomSchramSmets, QuentinQuentinSmetsChiappe, DanieleDanieleChiappeAsselberghs, IngeIngeAsselberghsBrems, StevenStevenBremsVerguts, KenKenVergutsMarinov, DaniilDaniilMarinovPantouvaki, MariannaMariannaPantouvaki2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30928Challenges of large area integration of 2D materials in CMOS lineMeeting abstracthttp://phantomsfoundation.com/GRAPHENECONF/2018/Abstracts/Grapheneconf_2018_Huyghebaert.pdf