Poly silicon germanium alloys, a suitable material for surface micromachined devices

Baert, KrisKrisBaertCaymax, MattyMattyCaymaxFiorini, PaoloPaoloFioriniSedky, SherifSherifSedky2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2354Poly silicon germanium alloys, a suitable material for surface micromachined devicesProceedings paper