Yu, HaoHaoYuSchaekers, MarcMarcSchaekersWang, LinlinLinlinWangEveraert, Jean-LucJean-LucEveraertJiang, Yu-LongYu-LongJiangMocuta, DanDanMocutaHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe Meyer2021-10-282021-10-282019-110741-3106https://imec-publications.be/handle/20.500.12860/34501Oxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contactsJournal article10.1109/LED.2019.2940819