Tutunjyan, NinaNinaTutunjyanSakharova, TaniaTaniaSakharovaKalandadze, GiviGiviKalandadzePavliashvili, TamazTamazPavliashviliKhuchua, NinaNinaKhuchua2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16332Application of plasma etch processes to gallium arsenide technologyProceedings paperwww.pesm2009.be