Soethoudt, JobJobSoethoudtTomczak, YoannYoannTomczakPopovici, Mihaela IoanaMihaela IoanaPopoviciKrishtab, MikhailMikhailKrishtabVan Elshocht, SvenSvenVan ElshochtAltamirano Sanchez, EfrainEfrainAltamirano SanchezDelabie, AnneliesAnneliesDelabie2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29472Substrate dependence of ruthenium atomic layer depositionMeeting abstracthttp://www.nanomanufacturing.nl/ASD2017/programbook.pdf