Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy

Bekaert, JoostJoostBekaertDoise, JanJanDoiseMKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyGronheid, RoelRoelGronheidChan, BTBTChanVandenberghe, GeertGeertVandenbergheCao, YiYiCaoHer, YoungJunYoungJunHer2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23529Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracyProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2066647