Zahedmanesh, HoumanHoumanZahedmaneshBesser, PaulPaulBesserWilson, ChrisChrisWilsonCroes, KristofKristofCroes2021-10-232021-10-2320160021-8979https://imec-publications.be/handle/20.500.12860/27645Airgaps in advanced nano-interconnects; mechanics and impact on electromigrationJournal articlehttp://scitation.aip.org/content/aip/journal/jap/120/9/10.1063/1.4961877