Using the self aligned field implant to design high voltage devices in sub-μm CMOS technologies

Vermandel, MiguelMiguelVermandelDoutreloigne, JanJanDoutreloigneMoens, P.P.MoensTack, MarnixMarnixTack2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4915Using the self aligned field implant to design high voltage devices in sub-μm CMOS technologiesProceedings paper