Fyen, WimWimFyenLauerhaas, JeffJeffLauerhaasVos, RitaRitaVosMeuris, MarcMarcMeurisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5304Non-contact post Cu CMP cleaning using megasonic energyProceedings paper