Evaluation of electron irradiated SiGe/Si diodes by Raman spectroscopy

Tsunoda, I.I.TsunodaNaka, N.N.NakaTakakura, K.K.TakakuraBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenClaeys, CorCorClaeysOhyama, HidenoriHidenoriOhyama2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18106Evaluation of electron irradiated SiGe/Si diodes by Raman spectroscopyMeeting abstract