High resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy

De Wolf, IngridIngridDe WolfChen, JianJianChenRasras, MahmoudMahmoudRasrasvan Spengen, MerlijnMerlijnvan SpengenSimons, VeerleVeerleSimons2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3388High resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopyProceedings paper