Baylav, BurakBurakBaylavMaloney, ChrisChrisMaloneyLevinson, ZacZacLevinsonBekaert, JoostJoostBekaertVaglio Pret, AlessandroAlessandroVaglio PretSmith, Bruce W.Bruce W.Smith2021-10-212021-10-2120131071-1023https://imec-publications.be/handle/20.500.12860/22027The impact of pupil plane filtering on mask roughness transferJournal articlehttp://scitation.aip.org/content/avs/journal/jvstb/31/6/10.1116/1.4825102