Ray Chaudhuri, AsheshAsheshRay ChaudhuriSeveri, SimoneSimoneSeveriErismis, Mehmet AkifMehmet AkifErismisFrancis, LaurentLaurentFrancisWitvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19670Design of a miniaturized accelerometer with 200 nm capacitive sensing gapMeeting abstract