Pham, NgaNgaPhamSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanRuythooren, WouterWouterRuythoorenDe Moor, PietPietDe MoorMajeed, BivraghBivraghMajeedBaert, KrisKrisBaertSwinnen, BartBartSwinnen2021-10-172021-10-1720080960-1317https://imec-publications.be/handle/20.500.12860/14312Photoresist coating and patterning for through-silicon via technologyJournal articlehttp://iopscience.iop.org/9060-1317/18/12/125008