Siconi for bulk FinFET (BFFT) recess etch

Cockburn, AndrewAndrewCockburnGravey, VirginieVirginieGraveyXu, T.T.XuDiehl, D.D.DiehlRedolfi, AugustoAugustoRedolfi2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18715Siconi for bulk FinFET (BFFT) recess etchOral presentation