Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance

Everaert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelMeszaros, AlbertAlbertMeszarosKis-Szabo, KrisztianKrisztianKis-SzaboTutto, PPTuttoPap, AronAronPapPavelka, TiborTiborPavelkaWilson, MarshallMarshallWilsonFindlay, AndrewAndrewFindlayEdelman, P.P.EdelmanLagowski, JacekJacekLagowski2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17087Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistanceProceedings paperhttp://ecsdl.org/ECST/