Zyulkov, IvanIvanZyulkovVoronina,VoroninaVoloshin,VoloshinChan, BTBTChanManchelevich,ManchelevichRachimova,RachimovaArmini, SilviaSilviaArminiDe Gendt, StefanStefanDe Gendt2021-10-282021-10-282019https://imec-publications.be/handle/20.500.12860/34560Area-selective Ru-ALD by amorphous carbon modification using H radicalsMeeting abstract