Mechanism of photochemical reactions and photophysical processes during UV curing of organosilicate films with low dielectric constant

Baklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16699Mechanism of photochemical reactions and photophysical processes during UV curing of organosilicate films with low dielectric constantMeeting abstract