Irradiation Induced Lattice Defects in Si1-xGex Devices and Their Effect on Device Performance

Ohyama, HidenoriHidenoriOhyamaVanhellemont, JanJanVanhellemontTakami, Y.Y.TakamiHayama, KiyoteruKiyoteruHayamaSunaga, H.H.SunagaPoortmans, JefJefPoortmansCaymax, MattyMattyCaymaxClauws, P.P.Clauws2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/280Irradiation Induced Lattice Defects in Si1-xGex Devices and Their Effect on Device PerformanceOral presentation