A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches

De Wolf, IngridIngridDe Wolfvan Spengen, MerlijnMerlijnvan SpengenMertens, RobertRobertMertensPuers, RobertRobertPuers2021-10-152021-10-152003-05https://imec-publications.be/handle/20.500.12860/7467A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switchesJournal article