DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

Pathangi Sriraman, HariHariPathangi SriramanVaid, VarunVarunVaidChan, BTBTChanVandenbroeck, NadiaNadiaVandenbroeckLi, JinJinLiHong, Sung EunSung EunHongCao, YiYiCaoDurairaj, BaskaranBaskaranDurairajLin, GuanyangGuanyangLinSomervell, MarkMarkSomervellKitano, TakahiroTakahiroKitanoHarukawa, RyotaRyotaHarukawaSah, KaushikKaushikSahCross, AndrewAndrewCrossBayana, HareenHareenBayanaD'Urzo, LuciaLuciaD'UrzoGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27126DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imecProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2506449