An improved technology for elevated source/drain MOSFETS

Waite, Andrew MichaelAndrew MichaelWaiteHoward, DaveDaveHowardKubicek, StefanStefanKubicekCaymax, MattyMattyCaymaxDe Meyer, KristinKristinDe MeyerEvans, A. G. R.A. G. R.Evans2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2302An improved technology for elevated source/drain MOSFETSProceedings paper